Ion Implantation and Diffusion Drive-In Paper
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Semiconductors: Ion Implantation and Diffusion Drive-In Paper
Perform some basic research in Ion Implantation and Diffusion Drive-In (for semicoductors) and document your findings in a maximum of 1000 words. Items to be included:
– Reason for Ion Implantation being very accurate
– Typical Mathematical models used and where they are used
– Ion channelling
– Annealing Process and typical temperature and atmosphere used.